Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11360391 | Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing method | Fumio Iwamoto, Yutaka Shiraishi | 2022-06-14 |
| 11363706 | Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Yutaka Shiraishi, Toshihiro Nishisaka | 2022-06-14 |
| 11320740 | Target supply device, target supply method, and electronic device manufacturing method | Yutaka Shiraishi, Toshihiro Nishisaka, Hiroshi Someya, Yukio Watanabe | 2022-05-03 |
| 11310899 | Target supply device, target supply method, and electronic device manufacturing method | Yutaka Shiraishi | 2022-04-19 |