Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11395398 | Extreme ultraviolet light generation apparatus and electronic device manufacturing method | — | 2022-07-19 |
| 11360391 | Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing method | Yutaka Shiraishi, Tsukasa HORI | 2022-06-14 |