Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11474433 | Extreme ultraviolet light generation apparatus and electronic device manufacturing method | Yuki Takeda | 2022-10-18 |
| 11360391 | Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing method | Fumio Iwamoto, Tsukasa HORI | 2022-06-14 |
| 11363706 | Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Toshihiro Nishisaka, Tsukasa HORI | 2022-06-14 |
| 11320740 | Target supply device, target supply method, and electronic device manufacturing method | Tsukasa HORI, Toshihiro Nishisaka, Hiroshi Someya, Yukio Watanabe | 2022-05-03 |
| 11310899 | Target supply device, target supply method, and electronic device manufacturing method | Tsukasa HORI | 2022-04-19 |