Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11315769 | Plasma source for rotating susceptor | Kallol Bera, Anantha K. Subramani, John C. Forster, Philip Allan Kraus, Hanhong Chen | 2022-04-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11315769 | Plasma source for rotating susceptor | Kallol Bera, Anantha K. Subramani, John C. Forster, Philip Allan Kraus, Hanhong Chen | 2022-04-26 |