Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508593 | Side storage pods, electronic device processing systems, and methods for operating the same | Paul B. Reuter | 2022-11-22 |
| 11450539 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Ayan Majumdar, John C. Menk, Helder Lee, Sangram Patil +3 more | 2022-09-20 |
| 11353381 | Portable disc to measure chemical gas contaminants within semiconductor equipment and clean room | Devendra Channappa Holeyannavar, Arunkumar Ramachandraiah, Jeffrey C. Hudgens, Shivaraj Manjunath Nara, Paul B. Reuter | 2022-06-07 |
| 11282724 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Ayan Majumdar, John C. Menk, Helder Lee, Sangram Patil +3 more | 2022-03-22 |
| 11244844 | High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods | Paul B. Reuter, Murali Narasimhan, Amulya L. Athayde, Patrick D. Pannese, Nir Merry | 2022-02-08 |