Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D966357 | Target profile for a physical vapor deposition chamber target | Jiao Song, Kirankumar Neelasandra SAVANDAIAH, Madan Kumar Shimoga Mylarappa | 2022-10-11 |
| 11361982 | Methods and apparatus for in-situ cleaning of electrostatic chucks | Kirankumar Neelasandra SAVANDAIAH, William Johanson, Prashant Prabhakar Prabhu | 2022-06-14 |
| 11295938 | Multi-radius magnetron for physical vapor deposition (PVD) and methods of use thereof | Jiao Song, Anthony Chih-Tung Chan, Kirankumar Neelasandra SAVANDAIAH, Irena H. Wysok | 2022-04-05 |
| D940765 | Target profile for a physical vapor deposition chamber target | Jiao Song, Kirankumar Neelasandra SAVANDAIAH, Madan Kumar Shimoga Mylarappa | 2022-01-11 |