Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462413 | Processing of workpieces using deposition process and etch process | Shanyu Wang, Hua Chung, Michael X. Yang, Tsai Wen Sung, Qi Zhang | 2022-10-04 |
| 11387115 | Silicon mandrel etch after native oxide punch-through | Tsai Wen Sung, Sio On Lo, Hua Chung, Michael X. Yang | 2022-07-12 |
| 11276560 | Spacer etching process | Tsai Wen Sung, Michael X. Yang | 2022-03-15 |