Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11385554 | Metrology apparatus and method for determining a characteristic relating to one or more structures on a substrate | Miguel GARCIA GRANDA, Steven E. Steen, Eric Brouwer, Pierre-Yves Guittet, Frank Staals +1 more | 2022-07-12 |
| 11347150 | Computational metrology | Wim Tjibbo Tel, Everhardus Cornelis Mos, Emil Peter Schmitt-Weaver, Yichen Zhang, Petrus Gerardus Van Rhee +4 more | 2022-05-31 |