Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11300524 | Pupil-plane beam scanning for metrology | Andrew V. Hill, Amnon Manassen, Asaf Granot, Andrei V. Shchegrov | 2022-04-12 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11300524 | Pupil-plane beam scanning for metrology | Andrew V. Hill, Amnon Manassen, Asaf Granot, Andrei V. Shchegrov | 2022-04-12 |