Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521874 | Systems and methods for determining measurement location in semiconductor wafer metrology | — | 2022-12-06 |
| 11300524 | Pupil-plane beam scanning for metrology | Andrew V. Hill, Amnon Manassen, Avi Abramov, Andrei V. Shchegrov | 2022-04-12 |
| 11244474 | Sample positioning system and method | — | 2022-02-08 |