Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430680 | Position and temperature monitoring of ALD platen susceptor | Kevin Griffin, Joseph Yudovsky, Kaushal Gangakhedkar, Dmitry A. Dzilno, Alex Minkovich | 2022-08-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430680 | Position and temperature monitoring of ALD platen susceptor | Kevin Griffin, Joseph Yudovsky, Kaushal Gangakhedkar, Dmitry A. Dzilno, Alex Minkovich | 2022-08-30 |