Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11493532 | Micromechanical sensor and methods for producing a micromechanical sensor and a micromechanical sensor element | Erhard Landgraf, Stephan Gerhard Albert, Sebastian PREGL, Matthias Rose | 2022-11-08 |
| 11422151 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Thoralf Kautzsch, Heiko Froehlich, Andre Roeth, Maik Stegemann, Mirko Vogt +1 more | 2022-08-23 |