Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11422151 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Thoralf Kautzsch, Steffen Bieselt, Heiko Froehlich, Maik Stegemann, Mirko Vogt +1 more | 2022-08-23 |
| 11393714 | Producing a buried cavity in a semiconductor substrate | Boris Binder, Thoralf Kautzsch, Uwe Rudolph, Maik Stegemann, Mirko Vogt | 2022-07-19 |