Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11393714 | Producing a buried cavity in a semiconductor substrate | Andre Roeth, Thoralf Kautzsch, Uwe Rudolph, Maik Stegemann, Mirko Vogt | 2022-07-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11393714 | Producing a buried cavity in a semiconductor substrate | Andre Roeth, Thoralf Kautzsch, Uwe Rudolph, Maik Stegemann, Mirko Vogt | 2022-07-19 |