Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11428661 | Method for producing a moisture sensor at the wafer level and moisture sensor | Marco Haubold, Heiko Froehlich, Olga Khvostikova, Marten Oldsen, Bernhard Straub | 2022-08-30 |
| 11422151 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Steffen Bieselt, Heiko Froehlich, Andre Roeth, Maik Stegemann, Mirko Vogt +1 more | 2022-08-23 |
| 11393714 | Producing a buried cavity in a semiconductor substrate | Andre Roeth, Boris Binder, Uwe Rudolph, Maik Stegemann, Mirko Vogt | 2022-07-19 |
| 11239375 | Method for manufacturing a pressure sensitive field effect transistor including a membrane structure | Vladislav Komenko, Heiko Froehlich, Andrey Kravchenko, Bernhard Winkler | 2022-02-01 |