Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11493532 | Micromechanical sensor and methods for producing a micromechanical sensor and a micromechanical sensor element | Erhard Landgraf, Steffen Bieselt, Sebastian PREGL, Matthias Rose | 2022-11-08 |
| 11300778 | MEMS device with suspension structure and method of making a MEMS device | Franz Michael Darrer, Marcus Hennecke, Hendrikus Van Lierop | 2022-04-12 |