Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531093 | Laser scanning control system and method | David Brunner, Georg Schitter, Han Woong Yoo | 2022-12-20 |
| 11467394 | Capacitive charge based self-sensing and position observer for electrostatic MEMS mirrors | Richard SCHROEDTER, Han Woong Yoo, David Brunner, Georg Schitter, Marcus Hennecke | 2022-10-11 |
| 11300778 | MEMS device with suspension structure and method of making a MEMS device | Stephan Gerhard Albert, Marcus Hennecke, Hendrikus Van Lierop | 2022-04-12 |