Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11427670 | Composition and process | Peter Roos, Mark Jeruzal, Qizheng Duo, Erik Eriksson | 2022-08-30 |
| 11307504 | Humidity control in EUV lithography | An-Ren Zi, Chin-Hsiang Lin, Ching-Yu Chang | 2022-04-19 |
| 11300878 | Photoresist developer and method of developing photoresist | An-Ren Zi, Chin-Hsiang Lin, Ching-Yu Chang | 2022-04-12 |