Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11435178 | Calibration sample, electron beam adjustment method and electron beam apparatus using same | Yoshinori Nakayama, Kaori Bizen, Hiroya Ohta, Yusuke Abe | 2022-09-06 |
| 11276551 | Inspection device | Atsuko Shintani, Noritsugu Takahashi, Hikaru Koyama | 2022-03-15 |
| 11251018 | Scanning electron microscope | Kaori Bizen, Yusuke Abe, Kenji Tanimoto | 2022-02-15 |
| 11227740 | Electron gun and electron beam application device | Soichiro Matsunaga, Souichi Katagiri, Makoto Sakakibara, Hajime Kawano, Takashi Doi | 2022-01-18 |