Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11435178 | Calibration sample, electron beam adjustment method and electron beam apparatus using same | Yasunari Sohda, Yoshinori Nakayama, Kaori Bizen, Yusuke Abe | 2022-09-06 |
| 11353798 | Pattern measurement device and pattern measurement method | Takuma Yamamoto, Kenji Tanimoto, Yusuke Abe, Tomohiro Tamori, Masaaki Nojiri | 2022-06-07 |