Showing 1–5 of 5 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Toru Hisamatsu | Tokyo Electron Limited | 7 |
| 2 | Kosuke Ogasawara | Tokyo Electron Limited | 2 |
| 2 | Takashi Aramaki | Panasonic | 2 |
| #4 | Shinya Morikita | Tokyo Electron Limited | 1 |
| #4 | Hiroyuki Takaba | Tokyo Electron Limited | 1 |
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