Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11519557 | Method for manufacturing filled container, and filled container | Masakiyo NAGATOMO, Shinya Ikeda | 2022-12-06 |
| 11447697 | Substrate processing gas, storage container, and substrate processing method | Yuuta Takeda, Jun Eto | 2022-09-20 |
| 11359278 | Treatment method and cleaning method for metal oxyfluorides | Masakiyo NAGATOMO | 2022-06-14 |
| 11335573 | Dry etching method and β-diketone-filled container | Kunihiro Yamauchi, Takashi Masuda | 2022-05-17 |
| 11289340 | Dry etching method | Shoi SUZUKI | 2022-03-29 |
| 11282714 | Etching method and etching device | Kunihiro Yamauchi, Tatsuo Miyazaki, Jun LIN, Susumu YAMAUCHI, Kazuaki Nishimura | 2022-03-22 |