Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11447697 | Substrate processing gas, storage container, and substrate processing method | Akifumi Yao, Jun Eto | 2022-09-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11447697 | Substrate processing gas, storage container, and substrate processing method | Akifumi Yao, Jun Eto | 2022-09-20 |