Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11289340 | Dry etching method | Akifumi Yao | 2022-03-29 |
| 11251051 | Dry etching method | Hiroyuki Oomori | 2022-02-15 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11289340 | Dry etching method | Akifumi Yao | 2022-03-29 |
| 11251051 | Dry etching method | Hiroyuki Oomori | 2022-02-15 |