Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11335573 | Dry etching method and β-diketone-filled container | Takashi Masuda, Akifumi Yao | 2022-05-17 |
| 11282714 | Etching method and etching device | Akifumi Yao, Tatsuo Miyazaki, Jun LIN, Susumu YAMAUCHI, Kazuaki Nishimura | 2022-03-22 |