Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11372334 | Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element | Ulrich Bingel, Willi Anderl | 2022-06-28 |
| 11355311 | Method and apparatus for determining a wavefront of a massive particle beam | Joachim Welte | 2022-06-07 |
| 11237187 | Method and apparatus for examining a measuring tip of a scanning probe microscope | Kinga Kornilov, Christof Baur | 2022-02-01 |