Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11487211 | Device and method for processing a microstructured component | Nicole Auth, Timo Luchs | 2022-11-01 |
| 11385539 | Method and apparatus for compensating defects of a mask blank | — | 2022-07-12 |
| 11366382 | Method and apparatus for performing an aerial image simulation of a photolithographic mask | Vladimir Dmitriev, Bernd Geh, Paul Graeupner, Anja Schauer | 2022-06-21 |
| 11366383 | Method and apparatus for determining positions of a plurality of pixels to be introduced in a substrate of a photolithographic mask | Vladimir Dmitriev, Kujan Gorhad, Tanya Serzhanyuk | 2022-06-21 |
| 11355311 | Method and apparatus for determining a wavefront of a massive particle beam | Markus Bauer | 2022-06-07 |
| 11249294 | Optical system and method for correcting mask defects using the system | Markus Seesselberg, Vladimir Dmitriev, Uri Stern, Tomer Cohen, Erez Graitzer | 2022-02-15 |