Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11366382 | Method and apparatus for performing an aerial image simulation of a photolithographic mask | Joachim Welte, Bernd Geh, Paul Graeupner, Anja Schauer | 2022-06-21 |
| 11366383 | Method and apparatus for determining positions of a plurality of pixels to be introduced in a substrate of a photolithographic mask | Kujan Gorhad, Joachim Welte, Tanya Serzhanyuk | 2022-06-21 |
| 11249294 | Optical system and method for correcting mask defects using the system | Markus Seesselberg, Joachim Welte, Uri Stern, Tomer Cohen, Erez Graitzer | 2022-02-15 |