Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11487211 | Device and method for processing a microstructured component | Timo Luchs, Joachim Welte | 2022-11-01 |
| 11385540 | Apparatus and method for determining a position of an element on a photolithographic mask | Michael Budach | 2022-07-12 |