Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11385540 | Apparatus and method for determining a position of an element on a photolithographic mask | Nicole Auth | 2022-07-12 |
| 11262378 | Apparatus and method for examining and/or processing a sample | Christof Baur | 2022-03-01 |
| 11256168 | Apparatus and method for repairing a photolithographic mask | Ottmar Hoinkis | 2022-02-22 |