Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11408064 | Mask structure and FCVA apparatus | — | 2022-08-09 |
| 11309208 | Electrostatic chuck and method for manufacturing protrusions thereof | Hua Ye, Hougong Wang, Jinguo ZHENG | 2022-04-19 |
| 11282735 | Electrostatic chuck and semiconductor equipment | Shuaitao SHI, Mengxin Zhao, Jinrong Zhao | 2022-03-22 |