Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11309208 | Electrostatic chuck and method for manufacturing protrusions thereof | Hua Ye, Quanyu Shi, Hougong Wang | 2022-04-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11309208 | Electrostatic chuck and method for manufacturing protrusions thereof | Hua Ye, Quanyu Shi, Hougong Wang | 2022-04-19 |