Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11328940 | Degassing chamber and semiconductor processing apparatus | Qiang Jia, Peijun Ding, Mengxin Zhao | 2022-05-10 |
| 11309208 | Electrostatic chuck and method for manufacturing protrusions thereof | Hua Ye, Quanyu Shi, Jinguo ZHENG | 2022-04-19 |