Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11328940 | Degassing chamber and semiconductor processing apparatus | Qiang Jia, Peijun Ding, Hougong Wang | 2022-05-10 |
| 11282682 | Magnetron drive mechanism, magnetron assembly and reaction chamber | Qing SHE, Jingfeng WEI, Jue Hou | 2022-03-22 |
| 11282735 | Electrostatic chuck and semiconductor equipment | Quanyu Shi, Shuaitao SHI, Jinrong Zhao | 2022-03-22 |