Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11282680 | Bearing device and plasma processing apparatus | Hao Guo, Peng-Yang Chen | 2022-03-22 |
| 11282682 | Magnetron drive mechanism, magnetron assembly and reaction chamber | Qing SHE, Jingfeng WEI, Mengxin Zhao | 2022-03-22 |