Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11303175 | Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method | Maarten Hartger Kimman, Dave Braaksma, Christiaan Alexander Hoogendam | 2022-04-12 |
| 11262663 | Tubular linear actuator, patterning device masking device and lithographic apparatus | Olof Martinus Josephus Fischer, Maarten Hartger Kimman, Edwin Van Horne, Antonie Hendrik Verweij | 2022-03-01 |