Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11262663 | Tubular linear actuator, patterning device masking device and lithographic apparatus | Peter Michel Silvester Maria Heijmans, Maarten Hartger Kimman, Edwin Van Horne, Antonie Hendrik Verweij | 2022-03-01 |