Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11442369 | Object stage bearing for lithographic apparatus | Yang-Shan Huang, Pieter Cornelis Johan De Jager, Rob Reilink, Christiaan Louis Valentin, Jasper Leonardus Johannes Scholten +1 more | 2022-09-13 |
| 11262663 | Tubular linear actuator, patterning device masking device and lithographic apparatus | Peter Michel Silvester Maria Heijmans, Olof Martinus Josephus Fischer, Maarten Hartger Kimman, Edwin Van Horne | 2022-03-01 |