Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11303175 | Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method | Maarten Hartger Kimman, Dave Braaksma, Peter Michel Silvester Maria Heijmans | 2022-04-12 |