Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11454892 | Fluid handling structure for lithographic apparatus | Pepijn Van Den Eijnden, Cornelius Maria Rops, Theodorus Wilhelmus Polet, Floor Lodewijk Keukens, Gheorghe Tanasa +8 more | 2022-09-27 |
| 11372336 | Lithography apparatus and device manufacturing method | Erik Henricus Egidius Catharina Eummelen, Frank Debougnoux, Koen Cuypers, Han Henricus Aldegonda Lempens, Theodorus Wilhelmus Polet +3 more | 2022-06-28 |
| 11372339 | Device manufacturing method and computer program | Pieter Jeroen Johan Emanuel Hoefnagels, Ronald Frank KOX, Marcus Johannes Van Der Zanden, Maarten Marinus Van Oene, Jorge Alberto Vieyra Salas | 2022-06-28 |
| 11231653 | Fluid handling structure and lithographic apparatus | Erik Henricus Egidius Catharina Eummelen, Johannes Cornelis Paulus Melman, Han Henricus Aldegonda Lempens, Miao Yu, Cornelius Maria Rops +4 more | 2022-01-25 |