Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11454892 | Fluid handling structure for lithographic apparatus | Pepijn Van Den Eijnden, Cornelius Maria Rops, Theodorus Wilhelmus Polet, Floor Lodewijk Keukens, Gheorghe Tanasa +8 more | 2022-09-27 |
| 11372336 | Lithography apparatus and device manufacturing method | Erik Henricus Egidius Catharina Eummelen, Frank Debougnoux, Han Henricus Aldegonda Lempens, Theodorus Wilhelmus Polet, Jorge Alberto Vieyra Salas +3 more | 2022-06-28 |