Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11372336 | Lithography apparatus and device manufacturing method | Erik Henricus Egidius Catharina Eummelen, Frank Debougnoux, Koen Cuypers, Han Henricus Aldegonda Lempens, Theodorus Wilhelmus Polet +3 more | 2022-06-28 |
| 11372339 | Device manufacturing method and computer program | Giovanni Luca Gattobigio, Pieter Jeroen Johan Emanuel Hoefnagels, Ronald Frank KOX, Marcus Johannes Van Der Zanden, Maarten Marinus Van Oene | 2022-06-28 |