Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11372336 | Lithography apparatus and device manufacturing method | Erik Henricus Egidius Catharina Eummelen, Frank Debougnoux, Koen Cuypers, Han Henricus Aldegonda Lempens, Theodorus Wilhelmus Polet +3 more | 2022-06-28 |
| 11231653 | Fluid handling structure and lithographic apparatus | Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio, Han Henricus Aldegonda Lempens, Miao Yu, Cornelius Maria Rops +4 more | 2022-01-25 |