Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531280 | Compact alignment sensor arrangements | Tamer Elazhary, Justin Kreuzer, Krishanu SHOME | 2022-12-20 |
| 11442372 | Method of measuring an alignment mark or an alignment mark assembly, alignment system, and lithographic tool | Ralph Brinkhof | 2022-09-13 |