Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531280 | Compact alignment sensor arrangements | Tamer Elazhary, Franciscus Godefridus Casper Bijnen, Krishanu SHOME | 2022-12-20 |
| 11526091 | Sensor apparatus and method for lithographic measurements | Tamer Elazhary, Yuxiang Lin, Kirill Urievich SOBOLEV | 2022-12-13 |