Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11526091 | Sensor apparatus and method for lithographic measurements | Tamer Elazhary, Justin Kreuzer, Yuxiang Lin | 2022-12-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11526091 | Sensor apparatus and method for lithographic measurements | Tamer Elazhary, Justin Kreuzer, Yuxiang Lin | 2022-12-13 |