Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531280 | Compact alignment sensor arrangements | Justin Kreuzer, Franciscus Godefridus Casper Bijnen, Krishanu SHOME | 2022-12-20 |
| 11525662 | Electromechanical displacement sensor | Yuri Toride | 2022-12-13 |
| 11526091 | Sensor apparatus and method for lithographic measurements | Justin Kreuzer, Yuxiang Lin, Kirill Urievich SOBOLEV | 2022-12-13 |