Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476077 | Interferometric stage positioning apparatus | Marcel Koenraad Marie Baggen, Wouter Onno Pril | 2022-10-18 |
| 11287242 | Cyclic error measurements and calibration procedures in interferometers | Maarten Jozef Jansen, Suzanne Johanna Antonetta Geertruda Cosijns | 2022-03-29 |
| 11262661 | Metrology apparatus | Nitesh Pandey, Arie Jeffrey Den Boef, Duygu Akbulut, Marinus Johannes Maria Van Dam, Hans Butler +4 more | 2022-03-01 |