Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11525737 | Wavelength tracking system, method to calibrate a wavelength tracking system, lithographic apparatus, method to determine an absolute position of a movable object, and interferometer system | — | 2022-12-13 |
| 11287242 | Cyclic error measurements and calibration procedures in interferometers | Engelbertus Antonius Fransiscus Van Der Pasch, Suzanne Johanna Antonetta Geertruda Cosijns | 2022-03-29 |