Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11519773 | Methods, systems, and apparatus for mass flow verification based on choked flow | Kevin Brashear, Justin Hough, Jaidev Rajaram, Marcel E. Josephson, Ashley M. Okada | 2022-12-06 |
| 11462426 | Methods and assemblies for gas flow ratio control | Kevin Brashear, Ashley M. Okada, Dennis L. Demars, Jaidev Rajaram, Marcel E. Josephson | 2022-10-04 |
| 11261538 | In-situ temperature mapping for epi chamber | Ala Moradian, Zuoming ZHU, Patricia M. Liu, Shu-Kwan LAU, Flora Fong-Song CHANG +1 more | 2022-03-01 |